New Micronic pattern generation tool combines throughput, resolution for TFT photomask applications

New Micronic pattern generation tool combines throughput, resolution for TFT photomask applications Täby, Sweden -- December 4, 2001 -- Micronic Laser Systems AB (OM Stockholm Exchange: MICR), a leading manufacturer of laser pattern generation equipment to the semiconductor and display industries, today introduced the LRS11000-TFT2, a leading edge display photomask pattern generation system designed specifically for the increasingly small transistor features of TFT photomasks. High resolution is essential to meet the increasingly complex specifications for TFT photomasks. The LRS11000-TFT2 provides cutting edge resolution while maintaining the throughput needed for cost effective manufacturing. The system features five laser exposure beams, as well as improved registration and CD uniformity. The LRS11000-TFT2 also incorporates powerful data handling capabilities that allow complex patterns to be processed quickly, eliminating delays during exposure and maintaining image quality. "Micronic's LRS11000-TFT2 provides across-the-board improvements over previous generations of the LRS11000 tools, including resolution and datapath," said Ulf Sundström, Micronic vice president for sales & customer support. "With a maximum plate size of 1100 by 1100 mm and 900 by 1200 mm, the system is large enough to accommodate the latest generation of both TFT and color filter photomasks." About Micronic Laser Systems AB Micronic Laser Systems AB is a Swedish high-tech company engaged in the development, manufacture and marketing of a series of extremely accurate laser pattern generators for the production of photomasks. The technology involved is known as microlithography. Micronic's systems are used by the world's leading electronics companies in the manufacture of television and computer displays, semiconductor circuits and semiconductor packaging components. Micronic is located in Täby, north of Stockholm and at present has subsidiaries in the United States and Japan and a service office in Taiwan. Micronic's net sales for 2000 amounted to MSEK 704 (MSEK 213 in 1999) and the company has 325 employees. Micronic maintains a web site at: http://www.micronic.se Company Contact: Agency Contact: Ulf Sundström Dylan McGrath VP Sales & Customer Support The Loomis Group, Inc. +46 8 638 52 00 (415) 882-9494 ulf.sundstrom@micronic.se dylan@loomisgroup.com ------------------------------------------------------------ This information was brought to you by Waymaker http://www.waymaker.net The following files are available for download: http://www.waymaker.net/bitonline/2001/12/04/20011204BIT00690/bit0002.doc http://www.waymaker.net/bitonline/2001/12/04/20011204BIT00690/bit0002.pdf

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