About Us

Vistec Electron Beam GmbH provides leading technology solutions for advanced electron-beam lithography. Based on the Variable-Shaped Beam (VSB) principle, the electron-beam lithography systems are mainly utilized for semiconductor applications and advanced research such as silicon direct write, compound semiconductor, mask making, integrated optics and several new emerging markets. The company is located in Jena, Germany. In addition to its production facility in Germany, Vistec Electron Beam maintains service and support centers in Europe, Taiwan and the US.