EDAX Launches SMX-ILH Process Metrology Platform

Latest Addition to the XLNCE Series of XRF Analyzers for Coating Thickness and Composition Analysis

MAHWAH, NJ – EDAX Inc., a leader in X-ray elemental analysis and electron diffraction instrumentation, has launched the XLNCE SMX-ILH, the latest in a series of new XRF analyzers for rapid, non-destructive coating thickness and composition analysis.The SMX-ILH process metrology system is an in-line process metrology tool, capable of integration into a production conveyor system or manual loading. Like the SMX-BEN benchtop analyzer, it is able to quickly and easily measure the thickness and composition of simple to complex multi-layer coatings and metal treatments as well as the composition of bulk materials.

“The SMX-ILH system ensures flexibility for integration into production environments. Its mechanical design allows for manual loading, the streaming of flexible substrates or integration into a production conveyor system. It offers rapid, non-destructive composition and thickness measurement analysis on virtually any material,” says Dr. Bruce Scruggs, XRF Product Manager at EDAX.

The SMX-ILH platform is flexible and can be adapted to accept rigid panels and flexible substrates according to production requirements.  It is an excellent choice for in-line process control, yield management, process development, and detailed individual product sampling. Typical applications include analysis of single or multi-layered metal surface treatments, such as corrosion, wear and thermal barrier coatings; aluminum surface treatments; photovoltaic layer formulations; and electrical and related buffer layers.

The SMX-ILH measuring head is identical to the one used on the SMX-BEN benchtop analyzer, which provides uniformity and ease of transition between laboratory development stages and process control in manufacturing.

“With the addition of the SMX-ILH, we now offer our customers yet another exciting option from the EDAX portfolio of analysis tools. The ILH expands EDAX’s offering of material characterization instrumentation onto the production floor, where these optimized, flexible tools provide coating thickness measurement and composition under process metrology conditions,” concludes Dr. Scruggs.


EDAX is the acknowledged leader in Energy Dispersive Microanalysis, Electron Backscatter Diffraction and X-ray Fluorescence instrumentation. EDAX designs, manufactures, installs and services high-quality products and systems for leading companies in the semiconductor, metals, geological, pharmaceutical, biomaterials, and ceramics markets.

Since 1962, EDAX has used its knowledge and experience to develop ultra-sensitive silicon radiation sensors, digital electronics and specialized application software that facilitate solutions to research, development and industrial requirements.

EDAX is a unit of the Materials Analysis Division of AMETEK, Inc., which is a leading global manufacturer of electronic instruments and electromechanical devices with annual sales of $4.0 billion. For further information about EDAX, contact:

Sue Arnell EDAX, Inc. 91 McKee Drive, Mahwah, NJ 07430 Tel: (201) 529-4880 • Fax: (201) 529-3156 E-mail: sue.arnell@ametek.com, Website: www.edax.com 


About Us

AMETEK is a leading global manufacturer of electronic instruments and electromechanical devices with annual sales of $4.0 billion.



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Latest in a series of new XRF elemental analyzers
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Performs rapid coating thickness and composition analysis
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In-line metrology tool integrates into production system
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