Zygo Releases VerifireXL Interferometer for Large Aperture Form Metrology

Middlefield CT – Zygo Corporation announces the release of the Verifire™ XL high-precision Fizeau interferometer for the simple and accurate characterization of flat surfaces up to 12 inches (300 mm) in diameter. Designed for measuring large plano surfaces, such as mirrors, semiconductor wafers, or optical windows, the Verifire XL is a turn-key solution incorporating staging, accessories and production-oriented technology. “The downward-looking orientation of the Verifire XL system with a heavy-duty part stage enables quick and easy metrology for a wide range of test parts,” according to