ETEL to Showcase Motion Systems And Nanometer Presentation at SEMICON 2016
SCHAUMBURG, IL (June 2016) – ETEL is pleased to showcase new and next generation motion systems for the semiconductor industry at the upcoming SEMICON 2016 trade show in San Francisco, CA from July 12-14 (Booth #1909). Also, a presentation on “Enabling Nanometer Stability” by ETEL will be given at various intervals in the booth.
During ETEL’s brief “Enabling Nanometer Stability” presentation, visitors will learn about a motion system stage where nanometer stability is accomplished. At HEIDENHAIN’s adjacent booth (#1809), visitors will learn about how a measuring technology using a linear encoder compares to and is better than a laser interferometer for nanometer stability.
ETEL’s booth will showcase a variety of motion systems, including the next generation RTMBi high performance indexing tables, the QuiET Active Isolation module, and the XYZT3H Stacked System including the Vulcano.
1) RTMBi Indexing Table:
ETEL announces the next generation of high performance indexing tables: the RTMBi. By combining ETEL’s high efficiency torque motors with HEIDENHAIN’s high resolution encoders in a very compact package, the RTMBi delivers industry-leading benefits.
2) QuiET Active Isolation System:
At SEMICON, ETEL will showcase QuiET, a propriety active isolation module for ETEL’s motion systems. QuiET is a 6 Degrees of Freedom (DOF) module cancelling both stage-born and ground-born vibrations enabling higher throughput and process reliability.
3) XYZT3H Stacked System, including the Vulcano:
ETEL is pleased to introduce the new XYZT3H Stacked System. The VULCANO XY part of it is a three-piece-design stacked system resulting in a cost-engineered solution providing high dynamics, great bidirectional repeatability, and outstanding position stability. It was born as a semiconductor front-end solution but can also serve many other applications
For more information on these actuators, call ETEL Systems Applications Engineer Julius Rurangirwa at 847-519-3952 (jrurangirwa@heidenhain.com) or Public Relations Manager Kathleen Stoneski at HEIDENHAIN at 847-519-4702 (kstoneski@heidenhain.com). ETEL’s website is www.etelusa.com
ETEL S.A. is based in Switzerland with exclusive North American distribution through HEIDENHAIN Corporation in Schaumburg, IL. As a leading international supplier of direct drive and motion control components and integrated systems, ETEL supports high tech industry with linear motors, torque motors, positioning stages, and motion controllers/systems.
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