Asian Photomask Supplier Places Double Order for Micronic TFT-LCD Photomask Tools

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Taby, Sweden – July 27, 2005 – Micronic Laser Systems today announced that an Asian photomask supplier has placed a double order for one LRS series laser pattern generator and one MMS15000 TFT-LCD photomask metrology system.

“Micronic continues to demonstrate its commitment to display manufacturers throughout the world by delivering additional capacity required for TFT-LCD photomask production,” said Sven Löfquist, Micronic’s president and CEO. “Micronic’s MMS15000 has received a broad acceptance in the market since its introduction in 2003. It is becoming the de-facto industry standard for TFT-LCD photomask measurement. Photomask shops need high accuracy metrology equipment in line with the capability of the LRS pattern generators.” The MMS15000 is a registration measurement system for TFT-LCD photomasks. The system is used to verify that the pattern placement on large area photomasks matches the high accuracy demands of advanced displays, a critical requirement in the production of advanced LCDs. The MMS15000 is based on the same production-proven technology as Micronic’s laser pattern generators. The system offers registration measurement accuracy of better than 100 nm and is capable of performing measurements on photomask as large as 1300 x 1500 mm. Company contact: Ulf Sundstrom Sr VP Corprate Sales ulf.sundstrom@micronic.se Tel: +46 8 638 52 00 Agency contact: Luz Rodriguez Loomis Group, Inc Tel: +33 1 58 18 59 30 rodriguezl@loomisgroup.com

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