Micronic and Fraunhofer in co-operation over new micro patterning technology
Micronic and Fraunhofer in co-operation over new micro patterning technology Micronic and Fraunhofer in Germany are in co-operation developing a new optical micro patterning method for semiconductor reticles and other advanced lithographic applications. The technology developed by the companies will overcome the limitations associated with laser scanning systems and promises to provide the resolution and the throughput required for 130 nanometers photomasks and beyond. "This new technology will enable us to follow the roadmap for several IC technology nodes and can also be applied to other photomask applications including displays and other large area uses", says Hans Buhre, Vice president R&D. About Micronic Laser Systems AB (publ.) Micronic Laser Systems is a Swedish high-tech company engaged in the development, manufacturing and marketing of a series of extremely accurate laser writers for the production of photomasks. The technology involved is known as microlithography. Micronic's systems are used by the world's leading electronics companies in the manufacturing of television and computer displays, semiconductor circuits and semiconductor packaging components. Micronic launches the Omega6000 product line on September 15 and 16 at Bacus Conference in Monterey, CA, USA. The Omega6000 is the first in a new family of optical pattern generators targeted for the production of semiconductor photomasks at the 180 nm technology node and beyond. The high resolution and outstanding line-width control together with a high- speed data path make the Omega6000 an ideal tool for producing advanced masks in a cost effective manner. About Fraunhofer The Fraunhofer Gesellschaft is Europe's leading organization for applied research, with its headquarters located in Munich, Germany. It operates 47 research institutes with nearly 9,000 employees, half of them scientists and engineers. The Fraunhofer Gesellschaft has expanded into a worldwide network with locations in Germany, the USA and Asia. Contact: Hans Buhre, Vice President R&D, phone +46 8 638 52 56 ------------------------------------------------------------ Please visit http://www.bit.se for further information The following files are available for download: http://www.bit.se/bitonline/1999/09/15/20000707BIT00620/bit0001.doc http://www.bit.se/bitonline/1999/09/15/20000707BIT00620/bit0002.pdf