Superior process quality with Picosun’s new R&D PEALD technology

ESPOO, Finland, 29th August 2019 – Picosun Group, the leading supplier of AGILE ALD® (Atomic Layer Deposition) thin film coating solutions, reports excellent results obtained with its next generation R&D PEALD (plasma-enhanced ALD) technology.

PEALD enables deposition at low temperatures and of several materials that could not be deposited with thermal process only. The drawback of PEALD, however, is damage to the sample surface, caused by ion bombardment. Picosun’s solution to this is remote plasma method, where the plasma source is located high enough above the sample, and the reactive species hitting the surface are radicals, not high-energy ions.

“Picosun’s operating philosophy is based on constant improvement and development, as we want to offer our customers always the best-in-class, leading quality ALD solutions. Our Picoplasma™ equipment has been a hit product in the R&D community since its launch, and we have now upgraded it to a completely new level, to enable even faster processing with superior film quality and purity,” says Dr. Jani Kivioja, CTO of Picosun Group.

Picosun’s next generation PEALD solution is based on remote, high power microwave plasma (MWP). The compact, lightweight plasma generator can be integrated to existing PICOSUN® R&D ALD reactors as such. The new plasma-ALD solution realizes deposition with virtually no added particles, with extremely low metal contamination and with far shorter cycle times compared to the previously used method. Excellent film quality and uniformity have been obtained(*), and the new MWP allows wider operating range (in terms of plasma parameters) which widens also the selection of available ALD processes.

“We are pleased to provide our customers with our new, thoroughly upgraded plasma-ALD solution. There are several important application areas, such as medical devices and MEMS, where substrates are sensitive and require processing at low temperatures. Now we have an ideal solution to this, which will again facilitate ALD’s breakthrough to yet new components and devices,” continues Dr. Kivioja.

(*) Film properties, SiO2 as an example:

Wafer size, dep. temperature, growth rate Film non-uniformity (1σ, 5mm EE, 49pts) Leakage current (@4MV) Particles (@>0,25µm) Metal contamination (Fe, Ti, Cr, Mn, Ni, Cu, Zn atoms)
200 mm, 400 oC, 0.86 Å/cycle 1.7 % (~10 nm film) 2.1 x 10-8 A/cm2 < 60 < 2 x 1010 /cm2

 

Picosun provides the most advanced ALD thin film coating technology to enable the industrial leap into the future, with turn-key production solutions and unmatched expertise in the field. Today, PICOSUN™ ALD equipment are in daily manufacturing use in numerous major industries around the world. Picosun is based in Finland, with subsidiaries in Germany, North America, Singapore, Taiwan, China and Japan, offices in India and France, and a world-wide sales and support network. Visit www.picosun.com.

More information:
Dr. Jani Kivioja
CTO, Picosun Group

Tel: +358 46 922 8804
Email: info@picosun.com;
Web: www.picosun.com

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About Us

Picosun is the leading supplier of AGILE ALD® (Atomic Layer Deposition) thin film coating solutions for semiconductor and other industries. PICOSUN® ALD product portfolio ranges from fully automated, SEMI compliant batch and cluster systems for up to 300 mm wafer size to smaller scale R&D and pre-pilot production tools, with special emphasis on cost-efficient, turn-key production solutions for up to 200 mm wafer markets. Production-proven coating solutions for IC, MEMS, LED, sensor, and 3D component (medical devices and implants, PCBAs, machinery parts, coins, watches and jewelry) processing are mastered with world-class process quality, agile and innovative equipment design, and the most comprehensive process support and customer care. Today, PICOSUN® ALD equipment are in daily manufacturing use in numerous major industries around the world. Picosun is based in Finland, with subsidiaries in Germany, North America, Singapore, Taiwan, China, and Japan, offices in France and India, and a world-wide sales and support network. For more information visit www.picosun.com.

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