Brooks Instrument Mass Flow Controllers and Pressure Products for Solar and Semiconductor Industries at Intersolar North America 2010
HATFIELD, Pa. (July 8, 2010) – Brooks Instrument, a world-leading provider of advanced flow measurement, pressure and level solutions, will showcase its mass flow and pressure products for the solar and semiconductor industries at Intersolar North America 2010, July 13-15, San Francisco. Brooks will showcase its Direct Liquid Injection Vaporizer System, as well as provide functioning demos of its GF Series mass flow controller, at Booth 8252 on Level 2 of the Moscone Center.
The GF Series is a highly modular, user programmable, ultra-high purity mass flow controller designed for advanced semiconductor and thin-film processes. Through proactive monitoring of the world’s largest install base of MultiFlo™ and pressure-transient insensitive mass flow controllers and continuous improvement engineering practices, the GF Series combines exceptional flow repeatability, market-leading 300 ms flow control response time, the most comprehensive gas and flow range programmability, and long-term reliability.
Brooks recently released new product enhancements to the GF Series. Initially launched for advanced Etch and chemical vapor deposition (CVD) processes, Brooks increased the range of flow rates available on the GF Series from the original 3 sccm to 30 slpm, to a new full-scale flow rate of 55 slpm.
The Brooks family of high-performing direct liquid injection (DLI) vaporizer systems features unique atomization and heat exchanger technologies for end-users requiring reliable liquid vaporization. The DLI vaporizer can accept multiple liquid inlets and will generate perfectly mixed vapors. Brooks offers several heat exchanger designs to accommodate a wide range of liquid properties: extremely low vapor pressures (sub 1 torr), very low flow rates (sub 5 grams per hour) and very high flow rates.
Additionally, the DLI vaporizer is close to being a true “vapor-on-demand” system because increasing, decreasing or stopping the incompressible liquid flow quickly results in the desired change in vapor flow.
To schedule a booth demo or interview with a Brooks representative at Intersolar North America 2010, contact Debra Yemenijian at debray@schubert.com or (610) 269-2100, ext. 224.
About Brooks Instrument
Brooks Instrument, LLC, based in Pennsylvania, is a company of highly trained specialists whose goal is to provide flow solutions that exceed customer expectations. The Company has a proven history of innovation including the first miniaturized Coriolis mass flow controller (Quantim), the first watertight and explosion proof thermal mass flow controller (Mf Series), the first thermal mass flow controller with Foundation Fieldbus (SLA Series), and the first variable area meter with Foundation Fieldbus (MT3809 & MT3750). Today, Brooks Instrument’s portfolio includes glass and metal tube variable area meters (rotameters), thermal mass flow controllers and meters, Coriolis mass flow controllers, meters and transmitters, pressure control products, magnetic level instruments, and a variety of flow accessories. The Company also owns Key Instruments which offers precision machined acrylic flow meters, molded plastic flow meters, glass tube flow meters, electronic flow meters, and flow control valves. Brooks Instrument has manufacturing locations, sales, and service offices in the Americas, Europe, and Asia. For more information on flow solutions, products, or sales contacts please visit www.BrooksInstrument.com.
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Contact:
Jim Hollis
Marketing Communications Manager
Brooks Instrument
215-362-3527
Jim.Hollis@BrooksInstrument.com
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