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Spatial ALD with the Beneq C2R addresses the deposition speed and film performance challenges presented by coating next-generation optics
Sami Sneck, VP of Advanced ALD at Beneq
We were surprised by ALD’s simple adaptation to optical coatings
Dr. Andreas Wienke, Head of Optical Components Department, LZH
With classical PVD processes, it’s nearly impossible to achieve a conformal coating on a strongly curved surface with the same reflection or transmission values over the whole area. With ALD, it is so simple and easy to achieve.
Dr. Andreas Wienke, Head of Optical Components Department, LZH
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Beneq Launches Beneq Transform® XP – Redefining Atomic Control in ALD

Second-generation platform delivers advanced control, in-cycle annealing, and high-throughput performance for Wide Bandgap power and RF device manufacturingEspoo, Finland, November 24, 2025 – Beneq introduces the Beneq Transform® XP, a second-generation ALD platform developed to meet the performance demands of Wide Bandgap (WBG) power and RF device technology development and manufacturing. Building on the proven Beneq Transform® platform, the new system adds advanced ALD control, faster cycle times, and greater process capabilities in a high-throughput format.  The Beneq Transform® XP

Beneq Unveils Beneq Transmute™ – High-Throughput ALD Tool for Power, RF, and μLED Device Production

New platform delivers ALD film quality at production throughput for Wide Bandgap and other specialty device manufacturingEspoo, Finland, November 19, 2025 – Beneq, a global leader in Atomic Layer Deposition (ALD) equipment and solutions, today announced Beneq Transmute™, a next-generation ALD platform designed for high-volume semiconductor manufacturing. Engineered for high volume production of Wide Bandgap (WBG) power electronics, advanced RF devices, μLED and other specialty devices, Beneq Transmute™ combines performance, scalability, and cost efficiency in one system.  Atomic

Beneq Advances MicroLED Leadership with Growing Demand from Industry Frontrunners

Espoo, Finland, July 14, 2025 – Beneq, a global leader in Atomic Layer Deposition (ALD) technology, is proud to announce significant progress in the microLED display market, underscored by repeat orders from industry-leading technology innovators. MicroLED technology is revolutionizing the future of displays across sectors including consumer electronics, augmented and virtual reality (AR/VR), and the automotive industry. With unparalleled brightness, contrast, energy efficiency, and durability, microLED represents a paradigm shift in how displays are designed and manufactured – enabling

Beneq Transform® Qualified for GaN Power Device Production by Tier 1 Asian Manufacturer

Beneq expands global footprint in GaN device manufacturing with ALD tool qualification at leading Asian semiconductor manufacturer Espoo, Finland, 1 May 2025 – Beneq announces that its Transform ALD cluster tool has been qualified for volume production of GaN-based power devices on 8’’ GaN-on-Si wafers by a Tier 1 GaN power device manufacturer in Asia. This milestone confirms the relevance of Beneq’s ALD technology in enabling scalable, high-reliability GaN applications.  Gallium nitride (GaN) semiconductors are central to improving efficiency and performance of power

Beneq and Exosens Collaborate on Lead-Free MCPs with ALD, Enhancing Precision, Performance, and Manufacturing Efficiency

ALD enables lead-free MCP production with precise thin-film deposition, enhancing manufacturing yields, device performance, and lifetime value. Exosens chose Beneq’s P400A batch and TFS 500 ALD systems for their scalability, precision, and ability to support development from R&D to production. Espoo, Finland, 06 Mar 2025 – Beneq and Photonis Scientific, part of the Exosens Group, have announced a significant advancement in Microchannel Plate (MCP) technology. This collaboration focuses on replacing traditional lead-based materials with ALD-enabled solutions, driving

LZH and Beneq set the stage for ultrafast ALD adoption in optics industry

Beneq, the home of Atomic Layer Deposition (ALD), and Lazer Zentrum Hannover (LZH) have developed a spatial ALD system to coat complex and 3D optics with conformal optical films at deposition rates of up to 1 µm/hour, marking a crucial milestone for volume manufacturing with ALD. Emerging optics, such as those in mobile phone cameras, AR/VR goggles and LiDAR devices, demand antireflective coatings with better conformality than achievable with traditional Physical vapor deposition (PVD) processes.Beneq’s C2R ALD system successfully achieves deposition rates 100 times faster than typical ALD

Beneq’s growth continues by expanding its workforce by nearly 40 percent – encouraging more students to join the sector

Press Release, Espoo, 28 November 2022.  Beneq, a prominent operator in the ALD sector, is seeing its business grow as a result of increased demand. The company expects its order volume to double this year and is hiring more people as a result. There is strong ALD expertise in Finland, however Beneq recruitment efforts are complicated by the overall shortage of skilled labor in the technology industry.Electronics are becoming more ubiquitous, increasing the need for semiconductor devices. As a result, the demand for Finnish-developed Atomic Layer Deposition (ALD) – a vital part of

Beneq fulfills customer demand for tailored ALD equipment services and support with BeneqCare[TM]

[BeneqCare service package for ALD equipment customers] Beneq, the home of Atomic Layer Deposition (ALD), has introduced BeneqCare, a new modular solution to offer support and maintenance services to organizations that own and operate Beneq ALD equipment. Beneq leads the market with ALD products for R&D, semiconductor device fabrication, 3D and batch production, ultra-fast spatial ALD (C2R), and roll-to-roll ALD. Today, the company has launched BeneqCare to help customers in the EU, Asia and the USA maximize the value of their ALD tools throughout their equipment’s life cycles. “We

Philips MEMS Foundry adopts Beneq Transform[®] ALD cluster tool

[En bild som visar text, utomhus, tecken Automatiskt genererad beskrivning]   Philips MEMS Foundry – part of Philips Engineering Solutions – commissioned the Beneq Transform® Lite ALD tool at the foundry on the High-Tech Campus in Eindhoven, the Netherlands, in autumn 2021. The state-of-the-art facility specializes in low to medium-volume custom MEMS manufacturing.   Philips MEMS Foundry’s  key prerequisite for an ALD tool was dielectric quality, for which the MEMS Foundry tested

Beneq unveils two new products to serve growing demand for ALD in 300mm and compound semiconductors respectively

BENEQ, PRESS RELEASE, December 6, 2021Beneq, a forerunner in industrial production using atomic layer deposition (ALD), has launched two new products for semiconductor device fabrication: the Transform® 300 and ProdigyTM.    Dedicated to the success of More-than-Moore device makers, Beneq revolutionized ALD cluster tools when it launched the highly successful Beneq Transform® family of products. Today, Beneq broadens its product portfolio further with two new and distinct solutions.   The Beneq Transform 300 and Prodigy were each designed in response to growing technology

Beneq Transform® charges forward with significant growth in More-than-Moore markets

BENEQ, PRESS RELEASE, November 15, 2021, 11.00 EEST [Beneq Transform ®] Image 1: Beneq Transform[®] Image 2: Beneq Transform[®] Lite The Beneq Transform®  has revolutionized ALD cluster tools for More-than-Moore semiconductor markets in the EU, the US and Asia since its launch in 2019. Based on its rapid success, Beneq plans to expand its portfolio to cater to the needs of even more semiconductor manufacturers.    Operating at up to 40 wafers/hour with three processing modules, the Beneq Transform® changed

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