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Spatial ALD with the Beneq C2R addresses the deposition speed and film performance challenges presented by coating next-generation optics
Sami Sneck, VP of Advanced ALD at Beneq
We were surprised by ALD’s simple adaptation to optical coatings
Dr. Andreas Wienke, Head of Optical Components Department, LZH
With classical PVD processes, it’s nearly impossible to achieve a conformal coating on a strongly curved surface with the same reflection or transmission values over the whole area. With ALD, it is so simple and easy to achieve.
Dr. Andreas Wienke, Head of Optical Components Department, LZH
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LZH and Beneq set the stage for ultrafast ALD adoption in optics industry

Beneq, the home of Atomic Layer Deposition (ALD), and Lazer Zentrum Hannover (LZH) have developed a spatial ALD system to coat complex and 3D optics with conformal optical films at deposition rates of up to 1 µm/hour, marking a crucial milestone for volume manufacturing with ALD. Emerging optics, such as those in mobile phone cameras, AR/VR goggles and LiDAR devices, demand antireflective coatings with better conformality than achievable with traditional Physical vapor deposition (PVD) processes.Beneq’s C2R ALD system successfully achieves deposition rates 100 times faster than typical ALD

Beneq’s growth continues by expanding its workforce by nearly 40 percent – encouraging more students to join the sector

Press Release, Espoo, 28 November 2022.  Beneq, a prominent operator in the ALD sector, is seeing its business grow as a result of increased demand. The company expects its order volume to double this year and is hiring more people as a result. There is strong ALD expertise in Finland, however Beneq recruitment efforts are complicated by the overall shortage of skilled labor in the technology industry.Electronics are becoming more ubiquitous, increasing the need for semiconductor devices. As a result, the demand for Finnish-developed Atomic Layer Deposition (ALD) – a vital part of

Beneq fulfills customer demand for tailored ALD equipment services and support with BeneqCare[TM]

[BeneqCare service package for ALD equipment customers] Beneq, the home of Atomic Layer Deposition (ALD), has introduced BeneqCare, a new modular solution to offer support and maintenance services to organizations that own and operate Beneq ALD equipment. Beneq leads the market with ALD products for R&D, semiconductor device fabrication, 3D and batch production, ultra-fast spatial ALD (C2R), and roll-to-roll ALD. Today, the company has launched BeneqCare to help customers in the EU, Asia and the USA maximize the value of their ALD tools throughout their equipment’s life cycles. “We

Philips MEMS Foundry adopts Beneq Transform[®] ALD cluster tool

[En bild som visar text, utomhus, tecken Automatiskt genererad beskrivning]   Philips MEMS Foundry – part of Philips Engineering Solutions – commissioned the Beneq Transform® Lite ALD tool at the foundry on the High-Tech Campus in Eindhoven, the Netherlands, in autumn 2021. The state-of-the-art facility specializes in low to medium-volume custom MEMS manufacturing.   Philips MEMS Foundry’s  key prerequisite for an ALD tool was dielectric quality, for which the MEMS Foundry tested

Beneq unveils two new products to serve growing demand for ALD in 300mm and compound semiconductors respectively

BENEQ, PRESS RELEASE, December 6, 2021Beneq, a forerunner in industrial production using atomic layer deposition (ALD), has launched two new products for semiconductor device fabrication: the Transform® 300 and ProdigyTM.    Dedicated to the success of More-than-Moore device makers, Beneq revolutionized ALD cluster tools when it launched the highly successful Beneq Transform® family of products. Today, Beneq broadens its product portfolio further with two new and distinct solutions.   The Beneq Transform 300 and Prodigy were each designed in response to growing technology

Beneq Transform® charges forward with significant growth in More-than-Moore markets

BENEQ, PRESS RELEASE, November 15, 2021, 11.00 EEST [Beneq Transform ®] Image 1: Beneq Transform[®] Image 2: Beneq Transform[®] Lite The Beneq Transform®  has revolutionized ALD cluster tools for More-than-Moore semiconductor markets in the EU, the US and Asia since its launch in 2019. Based on its rapid success, Beneq plans to expand its portfolio to cater to the needs of even more semiconductor manufacturers.    Operating at up to 40 wafers/hour with three processing modules, the Beneq Transform® changed

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