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Spatial ALD with the Beneq C2R addresses the deposition speed and film performance challenges presented by coating next-generation optics

Sami Sneck, VP of Advanced ALD at Beneq

We were surprised by ALD’s simple adaptation to optical coatings

Dr. Andreas Wienke, Head of Optical Components Department, LZH

With classical PVD processes, it’s nearly impossible to achieve a conformal coating on a strongly curved surface with the same reflection or transmission values over the whole area. With ALD, it is so simple and easy to achieve.

Dr. Andreas Wienke, Head of Optical Components Department, LZH

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Beneq fulfills customer demand for tailored ALD equipment services and support with BeneqCare[TM]

Thu, Mar 10, 2022 13:08 CET

[BeneqCare service package for ALD equipment customers] Beneq, the home of Atomic Layer Deposition (ALD), has introduced BeneqCare, a new modular solution to offer support and maintenance services to organizations that own and operate Beneq ALD equipment. Beneq leads the market with ALD products for R&D, semiconductor device fabrication, 3D and batch production, ultra-fast spatial ALD (C2R), and roll-to-roll ALD. Today, the company has launched BeneqCare to help customers in the EU, Asia and the USA maximize the value of their ALD tools throughout their equipment’s life cycles. “We

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Beneq fulfills customer demand for tailored ALD equipment services and support with BeneqCare[TM]

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