PICOSUN[®] Sprinter disrupts fast batch ALD on 300 mm wafers
ESPOO, Finland, 2[nd] December 2020 – Picosun Group, the leading supplier of AGILE ALD[®] (Atomic Layer Deposition) thin film coating solutions for global industries, has launched Sprinter , a brand new, fully automated high throughput ALD production module for 300 mm wafers. Barrier, high-k and other films are deposited in Sprinter with perfect ALD for semiconductor (e.g. emerging memory, transistor, capacitor), display, and IoT component applications. In Sprinter, single wafer film quality and uniformity are upscaled to fast batch