Excellent batch process results with Picosun new generation tools
ESPOO, Finland, 14th of October 2021 – PICOSUN® Morpher has continued to demonstrate excellent batch process results in the latest acceptance runs the company has performed for its customers in the global semiconductor industry. Excellent uniformities (<1% 1sigma) and single-digit particle levels have been reached at a number of acceptance runs with different film materials such as Al\2\O\3\ and SiO\2\. PICOSUN® Morpher was launched in 2019 for up to the 200 mm wafer markets. The tool’s strength is the adaptability to the changing needs of different business verticals, from corporate R&D