About Us

Beneq is the home of Atomic Layer Deposition (ALD). Founded in 1984, Beneq introduced the first industrial ALD production and continues to lead the market with solutions for R&D, semiconductor fabrication, and advanced manufacturing. Beneq’s product portfolio includes tools for lab-scale research (TFS 200, TFS 500), high-volume production (Transform®, Prodigy™), ultra-fast spatial ALD (C2R), and roll-to-roll ALD (Genesis).