Atlas Copco has acquired a technology for process diagnostics and control in the semiconductor industry
Nacka, Sweden, August 4, 2020: Atlas Copco has acquired the technology and operating assets of iTrap. The iTrap is an ion trap mass spectrometer instrument capable of highly sensitive real time gas analysis. The instrument is used for diagnostics or process control in semiconductor process chambers.The business is located in Oberkochen, in southern Germany, and has been part of ZEISS Venture. A few employees will join Atlas Copco. “The insights the technology can bring into the chemical environment in process chambers, in close to real time, will deliver significant value to our