PICOSUN® Sprinter demonstrates record-breaking batch film quality
ESPOO, Finland, 19[th] of May 2021 – Picosun Group has further optimized its PICOSUN[® ]Sprinter ALD system processes successfully for semiconductor, display and IoT component manufacturing lines. PICOSUN[®] Sprinter ALD system Al\2\O\3\ process results showed excellent thickness uniformity even at low 90 °C deposition temperature. At 300 °C temperature the results were at record-breaking level (<0.2% 1sigma) when measured within wafer. Furthermore, the team has continued to improve also other parts of the process performance. The production capacity has more than doubled in the last two