Philips MEMS Foundry adopts Beneq Transform[®] ALD cluster tool
[En bild som visar text, utomhus, tecken Automatiskt genererad beskrivning] Philips MEMS Foundry – part of Philips Engineering Solutions – commissioned the Beneq Transform® Lite ALD tool at the foundry on the High-Tech Campus in Eindhoven, the Netherlands, in autumn 2021. The state-of-the-art facility specializes in low to medium-volume custom MEMS manufacturing. Philips MEMS Foundry’s key prerequisite for an ALD tool was dielectric quality, for which the MEMS Foundry tested