Atlas Copco award recognizes innovative dry pump for semiconductor manufacturing
Stockholm, Sweden, March 29, 2018: This year the prestigious John Munck Award recognizes the development of an innovative dry pump. The pump is used in the semiconductor manufacturing process and improves service life and reliability.The John Munck Award for technical innovations is this year presented to Paul Neller, Andy Mann, Phil North, Dave Manson, Brian Murphy, Allen Park and Jonathan Youn, who work in the Semiconductor division in Atlas Copco’s Vacuum Technique business area. They are presented the award for developing the iXM dry pump. The pump, used in the semiconductor