Turn-key ALD solutions for MEMS manufacturing from Picosun
ESPOO, Finland, 29th November, 2017 – Picosun Oy (Finland), Silex Microsystems AB (Sweden), and Pegasus Chemicals Ltd (UK) have joined forces to develop and provide novel ALD (Atomic Layer Deposition) solutions and processes for MEMS (MicroElectroMechanical Systems) industries. The aim of the collaboration is to realize emerging, advanced MEMS structures that would not be possible to manufacture by any other thin film deposition methods. Today, MEMS are crucial components in several everyday applications such as mobile phones, cars and in various sensor systems. In addition to these